Course Title: MicroNanoSystems, MEMS, and NEMS

Part A: Course Overview

Course Title: MicroNanoSystems, MEMS, and NEMS

Credit Points: 12.00

Course Code




Learning Mode

Teaching Period(s)


City Campus


125H Electrical & Computer Engineering


Sem 1 2006,
Sem 2 2006,
Sem 2 2007,
Sem 1 2010,
Sem 1 2011,
Sem 1 2012,
Sem 1 2013,
Sem 1 2014,
Sem 2 2015,
Sem 2 2016


City Campus


125H Electrical & Computer Engineering


Sem 1 2012,
Sem 1 2013,
Sem 1 2014,
Sem 2 2015,
Sem 2 2016

Course Coordinator: Dr. Sumeet Walia

Course Coordinator Phone: +61 3 9925 2136

Course Coordinator Email:

Course Coordinator Location: 10.08.32

Course Coordinator Availability: E-Mail for appointment

Pre-requisite Courses and Assumed Knowledge and Capabilities

You are expected to have reasonable competency in electronics and mathematics.
It is recommended that you undertake courses related to microelectronics/microsystems fabrication prior to or in addition to this course, to achieve improved learning outcomes.

Course Description

Microsystems technology can broadly be defined as the development and integration of sensors, actuators, and other three-dimensional structures on the micron-scale and often using microelectronics fabrication techniques.

Microsystems technology encompasses the popular fields of micro-electro-mechanical systems (MEMS) and microfluidics. Both technologies are fast becoming ubiquitous, ranging in applications from automobiles (accelerometers) and computing (inkjet printer heads) to biomedical engineering (drug delivery systems, medical diagnostics). Through design and fabrication, microsystems technology combines different disciplines of engineering, physics, chemistry, and biomedicine to realise novel miniature devices.

This course is designed to introduce you to microsystems technology. It aims to provide you with the necessary knowledge and skills to design, model, micro-fabricate, and interface microsystem devices. The complementary unification of these areas gives you an integrated systems approach necessary for practical microsystems design. Throughout the course, an emphasis is placed on real-world applications of the technology, industry expectation, and research opportunities.

Please note that if you take this course for a bachelor honours program, your overall mark for the course will be one of the course marks used to calculate the weighted average mark (WAM) that will determine your award level. This applies to students who commence enrolment in a bachelor honours program from 1 January 2016 onwards. See the WAM information webpage for more information (;ID=eyj5c0mo77631).

Objectives/Learning Outcomes/Capability Development

This course develops the following Program Learning Outcomes:

  1. High levels of technical competence in the field
  2. Be able to apply problem solving approaches to work challenges and make decisions using sound engineering methodologies
  3. Be able to apply a systematic design approach to engineering projects and have strong research and design skills in their stream

On successful completion of this course you will be able to:

  • Design and analyze MEMS devices and structures
  • Describe fabrication process and sequences
  • Fabricate polymer microfluidics chips
  • Integrate and test polymer microfluidics chips

Overview of Learning Activities

The course will provide interactive and hands-on learning experiences:

  • Lectures (with interactive tutorial components) covering the fundamentals of microsystems
  • Computer-based laboratory sessions (instructor guided) on microsystems design and processing tools
  • Cleanroom fabrication (hands-on) of polymer microfluidics chips (instructor guided) followed by integration and testing (with fluorescent dyes)
  • Group project to provide training in research skills, especially literature review

Overview of Learning Resources

You will be provided with detailed lecture and tutorial content as learning resources. This will be supported by elaborate supplementary (non-assessable) reading material to enhance the learning outcomes. Course content will made available on-line.

Overview of Assessment

Assessment (laboratories, project and tests) will occur on a regular basis through the semester to provide you feedback on your performance and the quality of your learning outcomes. There is also a final examination.