Course Title: Microsystems Introduction to Principles and Design

Part A: Course Overview

Course Title: Microsystems Introduction to Principles and Design

Credit Points: 12.00


Course Code

Campus

Career

School

Learning Mode

Teaching Period(s)

EEET2146

City Campus

Postgraduate

125H Electrical & Computer Engineering

Face-to-Face

Sem 1 2006,
Sem 2 2006,
Sem 2 2007

Course Coordinator: Anthony Holland

Course Coordinator Phone: +61 3 99252150

Course Coordinator Email: anthony.holland@rmit.edu.au

Course Coordinator Location: 12.7.12


Pre-requisite Courses and Assumed Knowledge and Capabilities

Admission into the program normally requires a four-year Bachelor of Engineering degree in Electronic Engineering or Computer Engineering or Communication/Telecommunication Engineering or a four year Bachelor of Science (Honours) degree in an appropriate field, or an equivalent qualification.

Applicants with a three year Bachelor of Science degree (in an appropriate field) or a Bachelor of Engineering degree in another field may also be considered for admission on the condition that they may be required to take up additional (preliminary) course (subjects) that will strengthen their knowledge and skills in digital systems, analogue electronics and microprocessor systems.


Course Description

Microelectromechanical Systems (MEMS) is a new and rapidly emerging area of micro engineering. Through design and fabrication, MEMS technology combines different disciplines of engineering, physics, chemistry and biology to realise novel miniature devices such as sensors and actuators.

This course is designed to introduce students to microsystems technology and to provide the necessary knowledge and skills to design, model, fabricate and interface microsystem devices. The complementary unification of these areas gives the student an integrated systems approach necessary for sensible MEMS design. Throughout the course, an emphasis is placed on industrial and commercial applications of microsystem technology. Also, both electrical and optical MEMS devices within the micro device domain are explored.


Objectives/Learning Outcomes/Capability Development

On completion of this course you will have a sound technical knowledge of MEMS devices, technology, fabrication processing, and be proficient in the design and analysis of standard MEMS devices.


On completion of this course you will have a sound technical knowledge of MEMS devices, technology, fabrication processing, and be proficient in the design and analysis of standard MEMS devices.


Overview of Learning Activities

Familiar with the design and analysis of MEMS structures (Finite Element Analysis, electrostatic, piezoelectric, magnetic, etc.).
•Design experience in multiphysics systems.
•Development of fabrication processes and sequences.
•Understanding the integration and packaging issues of MEMS devices.
•Exposure to measurement and instrumentation devices.


Overview of Learning Resources

1. Tai-Ran Hsu, “MEMS and Microsystems Design and Manufacture”, McGaw-Hill, 2003.
2.Madou, M., Fundamentals of Microfabrication, CRC Press, 1997.


Overview of Assessment

Examination and group project.