Course Title: Microsystems - Fabrication Processes

Part A: Course Overview

Course Title: Microsystems - Fabrication Processes

Credit Points: 12.00

Course Code




Learning Mode

Teaching Period(s)


City Campus


125H Electrical & Computer Engineering


Sem 1 2006,
Sem 2 2006,
Sem 1 2007,
Sem 2 2007

Course Coordinator: Anthony Holland

Course Coordinator Phone: +61 3 9925 2150

Course Coordinator Email:

Course Coordinator Location: 12.7.12

Pre-requisite Courses and Assumed Knowledge and Capabilities

Students are expected to be reasonably competent in mathematics, physics and have a knowledge of electronics.

Course Description

The course will focus on the fabrication procedures which are used in industry to produce silicon microtechnology devices. The topic material will be supported where practicable by boratory/clean room demonstrations of the various processes.

The subject material is divided into five modules as follows:
Introduction of basic fabrication processes, materials and clean room protocols.
Photolithography, masking and patterning of materials.
Semiconductor oxidation and diffusion.
Ion implantation and thermal processing.
Metal and dielectric deposition and etching for micropatternable layers. 

Objectives/Learning Outcomes/Capability Development

Generally, the capabilities acquired by the students will include:
Technical knowledge of chip fabrication processes.
Ability to communicate effectively in writing.
Ability to undertake self-directed study.

Upon satisfactory completion of this subject, students will be able to:
Describe the clean room environment/laboratory procedures for chip fabrication
Explain the basic theory and practice of processing steps used in the fabrication of silicon chips
Describe the specialized equipment used in chip fabrication.
Describe the integration and flow of the processing steps.

Overview of Learning Activities

The subject is to be based on a series of lectures covering the stated topics and laboratory demonstrations. In addition, students are expected to undertake self paced exercises in the topic material. In summary, the delivery methods will cover the following:
Lecture or equivalent material presentations;
Supervised laboratory demonstrations,
Self-paced exercises and problem solving

Overview of Learning Resources

Learning resources for this course include:
Lecture Notes (as part of course learning guide) prepared by the teaching staff.
Prescribed textbook/s: See the course guide available at the start of classes.
Recommended reference books: See the course guide available at the start of classes.

Overview of Assessment

The assessment for this course comprises: Reports on laboratory work, Project assignments which include computer simulation and design projects;  End of semester examination of not more than 3 hours duration.

Assignments   30%

Examination  70%