Course Title: MicroNanoFabrication Cleanroom Processes

Part A: Course Overview

Course Title: MicroNanoFabrication Cleanroom Processes

Credit Points: 12.00


Course Code




Learning Mode

Teaching Period(s)


City Campus


125H Electrical & Computer Engineering


Sem 2 2016


City Campus


172H School of Engineering


Sem 1 2018

Course Coordinator: Dr Shiva Balendhran

Course Coordinator Phone: +61 3 9925 1833

Course Coordinator Email:

Course Coordinator Location: 10.07.09

Course Coordinator Availability: Email for an appointment

Pre-requisite Courses and Assumed Knowledge and Capabilities


Course Description


A cleanroom is a controlled environment in which micro and nano devices are manufactured. This course will provide a detailed overview of cleanroom-based processes and related materials. In particular, you will be provided with hands-on training on fabrication processes in the cleanrooms at the MicroNano Teaching Facility. Photolithography (patterning with light) is an oft repeated process in microfabrication. You will be competent in photolithography and be able to select and apply device fabrication processes in developing micronano devices.

Objectives/Learning Outcomes/Capability Development

This course contributes to the following Program Learning Outcomes:
• High levels of technical competence in the field
• Be able to apply problem solving approaches to work challenges and make decisions using sound engineering methodologies
• Be able to apply a systematic design approach to engineering projects and have strong design skills in the chosen discipline specialisation.

On completion of this course you should be able to:
1. Describe the cleanroom procedures and related occupational health and safety risks and preventive measures,
2. Identify and relate parameters involved in microfabrication, particularly photolithography, to the device characteristics and,
3. Plan and carry out basic microfabrication steps for integrated electronic devices.

Overview of Learning Activities

You will undertake the following learning activities:
• Lectures
• Hands-on training of various cleanroom fabrication techniques

Overview of Learning Resources

The learning resources available to you include:
• Lists of relevant reference texts, resources in the library and freely accessible Internet sites will be provided.
• You will also use the cleanrooms in the Micro Nano Teaching Facility extensively for this course.

Overview of Assessment

This course has no hurdle requirements.

Assessment tasks


Engineering Risk Assessment (20% Weighting)

This assessment supports CLOs 1, 2, and 3

Lab Test 01 (10% Weighting)

Proficiency in positive photo-lithogrpahy process.

This assessment task supports CLO 1

Lab Test 02 (10% Weighting)

Proficiency in image reversal process

This assessment task supports CLOs 2 and 3

Lab Test 03 (10% Weighting)

Proficiency in Negative lithography and PDMS processing

This assessment task supports CLOs 2 and 3

Final laboratory exam (50% Weighting)

This assessment supports CLOs 1, 2, and 3

Performing photolithography successfully and resolving common microfabrication problems