Course Title: MicroNanoSystems, MEMS, and NEMS

Part A: Course Overview

Course Title: MicroNanoSystems, MEMS, and NEMS

Credit Points: 12.00

Terms

Course Code

Campus

Career

School

Learning Mode

Teaching Period(s)

EEET2044

City Campus

Postgraduate

125H Electrical & Computer Engineering

Face-to-Face

Sem 1 2006,
Sem 2 2006,
Sem 2 2007,
Sem 1 2010,
Sem 1 2011,
Sem 1 2012,
Sem 1 2013,
Sem 1 2014,
Sem 2 2015,
Sem 2 2016

EEET2044

City Campus

Postgraduate

172H School of Engineering

Face-to-Face

Sem 1 2018,
Sem 1 2019,
Sem 1 2020,
Sem 2 2021

EEET2379

City Campus

Undergraduate

125H Electrical & Computer Engineering

Face-to-Face

Sem 1 2012,
Sem 1 2013,
Sem 1 2014,
Sem 2 2015,
Sem 2 2016

EEET2379

City Campus

Undergraduate

172H School of Engineering

Face-to-Face

Sem 1 2018,
Sem 1 2019,
Sem 2 2021

Course Coordinator: Assoc Professor Khashayar Khoshmanesh

Course Coordinator Phone: +61 3 9925 2851

Course Coordinator Email: khashayar.khoshmanesh@rmit.edu.au

Course Coordinator Location: B012 F08 R009

Course Coordinator Availability: E-Mail for appointment


Pre-requisite Courses and Assumed Knowledge and Capabilities

You are expected to have reasonable competency in electronics and mathematics.
It is recommended that you undertake courses related to microelectronics/microsystems fabrication prior to or in addition to this course, to achieve improved learning outcomes.


Course Description

Microsystems technology can broadly be defined as the development and integration of sensors, actuators, and other three-dimensional structures on the micron-scale and often using microelectronics fabrication techniques.


Microsystems technology encompasses the popular fields of micro-electro-mechanical systems (MEMS) and microfluidics. Both technologies are fast becoming ubiquitous, ranging in applications from automobiles (accelerometers) and computing (inkjet printer heads) to biomedical engineering (drug delivery systems, medical diagnostics). Through design and fabrication, microsystems technology combines different disciplines of engineering, physics, chemistry, and biomedicine to realise novel miniature devices.


This course is designed to introduce you to microsystems technology. It aims to provide you with the necessary knowledge and skills to design, model, micro-fabricate, and interface microsystem devices. The complementary unification of these areas gives you an integrated systems approach necessary for practical microsystems design. Throughout the course, an emphasis is placed on real-world applications of the technology, industry expectation, and research opportunities.

Please note that if you take this course for a bachelor honours program, your overall mark for the course will be one of the course marks used to calculate the weighted average mark (WAM) that will determine your award level. This applies to students who commence enrolment in a bachelor honours program from 1 January 2016 onwards. See the WAM information webpage for more information (www1.rmit.edu.au/browse;ID=eyj5c0mo77631).


Objectives/Learning Outcomes/Capability Development

This course develops the following Program Learning Outcomes:

  • High levels of technical competence in the field
  • Be able to apply problem solving approaches to work challenges and make decisions using sound engineering methodologies
  • Be able to apply a systematic design approach to engineering projects and have strong research and design skills in their stream
  •  Effective teamwork and leadership skills




On successful completion of this course you will be able to:

  1. Design and analyze miniture devices and structures
  2. Describe fabrication process and sequences
  3. Develop and analyse a miniaturised actuator


Overview of Learning Activities

The course will provide interactive and hands-on learning experiences:

  • Lectures (Pre-recorded and face-to-face lectures along with interactive tutorial components) covering the fundamentals of microsystems
  • Computer-based laboratory sessions (instructor guided) on microsystems design and processing tools
  • Group project to provide training in the development of miniaturised sensors/actuators


Overview of Learning Resources

You will be provided with detailed lecture and tutorial content as learning resources. This will be supported by elaborate supplementary (non-assessable) reading material to enhance the learning outcomes. Course content will made available on-line.


Overview of Assessment

Assessment Task 1: Design assignment

Students need to provide the detailed design of a few miniaturised microfluidic devices, soft electronics, and wearable sensors, and upload their designs via Canvas individually.
Weighting 45%
Due week 6
This assessment task supports CLO 1 and 2

 

Assessment Task 2: Executive summary

Students need to select a research project from a list, which will be provided and explained to them. They need to form groups of up to 3-4 individuals and provide an executive summary of their approach for design, development, and characterisation of a miniaturised sensor/actuator.
Weighting 15%
Due week 8
This assessment task supports CLO 1, 2, and 3

 

Assessment Task 3: Project report, demonstration, and presentation

Students will be divided into groups of up to 3-4 individuals to develop a simple miniaturised sensor/actuator. Given the simplicity of the system, its components can be acquired, assembled, tested, and analysed while students are off-campus. The progress of the project will be monitored via on-line meetings.

Students who cannot form a group can perform this project individually.

Weighting 40%
Due week 14
This assessment task supports CLOs 1, 2 and 3